Michel Foucault, “Nietzsche, Freud, Marx” (1964) available in the volume Aesthetics, Method, and Epistemology.
Michel Foucault, “Nietzsche, Genealogy, History” (1971) available in the volume Truth and Method.
Michel Foucault, “Lesson on Nietzsche” (1971) available in the Collège de France lectures, Lessons on the Will to Know.